Open AccessToward ultrafast, ultra-stable imaging arrays: Superlattice doping to enhance the performance of backside-illuminated 3D-hybridized silicon photodetectors
Author(s) -
April D. Jewell,
Quinn Looker,
Marcos O. Sanchez,
Shouleh Nikzad,
Michael E. Hoenk
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5140979
Subject(s) - photodetector , optoelectronics , materials science , detector , doping , passivation , responsivity , photodiode , wafer , silicon , ultrashort pulse , optics , nanotechnology , physics , laser , layer (electronics)
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