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Correlation of Auger electron spectroscopy and microsynchrotron radiation x-ray photoelectron spectroscopy investigations of Ba-Sc-O desorption on W(100)
Author(s) -
Michael Mroz,
Martin E. Kordesch,
Jerzy T. Sadowski,
Samuel Tenney,
Calley Eads
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5134649
Subject(s) - x ray photoelectron spectroscopy , auger electron spectroscopy , scandium , analytical chemistry (journal) , barium , spectroscopy , electron spectroscopy , desorption , materials science , evaporation , vacuum evaporation , chemistry , thin film , adsorption , nuclear magnetic resonance , physics , nanotechnology , chromatography , quantum mechanics , nuclear physics , metallurgy , thermodynamics

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