Open AccessLutetium coating of nanoparticles by atomic layer deposition
Author(s) -
J.L.T.M. Moret,
Matthew B. E. Griffiths,
Jeannine E. B. M. Frijns,
Baukje E. Terpstra,
Hubert Th. Wolterbeek,
Seán T. Barry,
Antonia G. Denkova,
J. Ruud van Ommen
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5134446
Subject(s) - lutetium , coating , nanoparticle , materials science , fluidization , atomic layer deposition , layer (electronics) , deposition (geology) , chemical engineering , fluidized bed , oxide , nanotechnology , metallurgy , chemistry , organic chemistry , paleontology , sediment , biology , engineering , yttrium
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