Open AccessElectron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges
Author(s) -
Keith Hernandez,
Lawrence Overzet,
Matthew Goeckner
Publication year - 2020
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5133790
Subject(s) - plasma , atomic physics , ambipolar diffusion , materials science , electron , analytical chemistry (journal) , chemistry , physics , chromatography , quantum mechanics