Open AccessBlock copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study
Author(s) -
Jakin B. Delony,
Peter J. Ludovice,
Clifford L. Henderson
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5131639
Subject(s) - materials science , copolymer , lithography , molecular dynamics , dispersity , polymer , block (permutation group theory) , nanotechnology , composite material , chemical physics , optoelectronics , polymer chemistry , chemistry , computational chemistry , geometry , mathematics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom