Open AccessBlock copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study
Author(s) -
Jakin B. Delony,
Peter J. Ludovice,
Clifford L. Henderson
Publication year - 2020
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5131639
Subject(s) - materials science , copolymer , lithography , molecular dynamics , block (permutation group theory) , dispersity , polymer , self assembly , nanotechnology , chemical physics , composite material , optoelectronics , chemistry , polymer chemistry , computational chemistry , mathematics , geometry