Role of template layers for heteroepitaxial growth of lanthanum oxide on GaN(0001) via atomic layer deposition | Zendy

PeiYu Chen | Zendy; Tobias Hadamek | Zendy; Sunah Kwon | Zendy; Fatima Al-Quaiti | Zendy; Agham Posadas | Zendy; Moon J. Kim | Zendy; Alexander A. Demkov | Zendy; John G. Ekerdt | Zendy

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Role of template layers for heteroepitaxial growth of lanthanum oxide on GaN(0001) via atomic layer deposition

Author(s) -

PeiYu Chen,

Tobias Hadamek,

Sunah Kwon,

Fatima Al-Quaiti,

Agham Posadas,

Moon J. Kim,

Alexander A. Demkov,

John G. Ekerdt

Publication year - 2019

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.5131638

Subject(s) - atomic layer deposition , materials science , electron diffraction , thin film , molecular beam epitaxy , island growth , lanthanum oxide , dielectric , lanthanum , transmission electron microscopy , optoelectronics , deposition (geology) , layer (electronics) , epitaxy , crystallography , nanotechnology , diffraction , oxide , chemistry , optics , inorganic chemistry , metallurgy , biology , paleontology , physics , sediment

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