Open AccessRole of template layers for heteroepitaxial growth of lanthanum oxide on GaN(0001) via atomic layer deposition
Author(s) -
Pei-Yu Chen,
Tobias Hadamek,
Sunah Kwon,
Fatima Al-Quaiti,
Agham Posadas,
Moon Kim,
Alexander A. Demkov,
John G. Ekerdt
Publication year - 2019
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5131638
Subject(s) - atomic layer deposition , materials science , electron diffraction , thin film , molecular beam epitaxy , island growth , lanthanum oxide , dielectric , lanthanum , transmission electron microscopy , optoelectronics , deposition (geology) , layer (electronics) , epitaxy , crystallography , nanotechnology , diffraction , oxide , chemistry , optics , inorganic chemistry , metallurgy , biology , paleontology , physics , sediment