Open AccessEffects of polymer residue on the pull-in of suspended graphene
Author(s) -
Jimmy Ng,
Talmage Jones,
I. MartínezVelis,
Albert Wang,
Jonathan B. Hopkins,
Ya–Hong Xie
Publication year - 2020
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5126439
Subject(s) - graphene , materials science , polymer , microelectromechanical systems , residue (chemistry) , nanotechnology , photolithography , composite material , optoelectronics , chemistry , organic chemistry