Open AccessHigh-brightness source of energetic He atoms
Author(s) -
Venu S. Jonnalagadda,
Navjot S. Randhawa,
Apeksha Awale,
Pratik Motwani,
J. C. Wolfe
Publication year - 2019
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5124838
Subject(s) - atomic physics , ion beam , ion , beam (structure) , ion beam deposition , ion beam lithography , space charge , optics , physics , electron , quantum mechanics