Open AccessUltrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications
Author(s) -
Moshe Dolejsi,
Priya Moni,
Cody Bezik,
Chun Zhou,
Juan Pablo,
Karen K. Gleason,
Paul F. Nealey
Publication year - 2019
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5121541
Subject(s) - materials science , chemical vapor deposition , lithography , template , deposition (geology) , polystyrene , polymer , nanotechnology , surface energy , range (aeronautics) , optoelectronics , composite material , paleontology , sediment , biology