Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications | Zendy

Moshe Dolejsi | Zendy; Priya Moni | Zendy; Cody Bezik | Zendy; Chun Zhou | Zendy; Juan Pablo | Zendy; Karen K. Gleason | Zendy; Paul F. Nealey | Zendy

Open Access

Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications

Author(s) -

Moshe Dolejsi,

Priya Moni,

Cody Bezik,

Chun Zhou,

Juan Pablo,

Karen K. Gleason,

Paul F. Nealey

Publication year - 2019

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.5121541

Subject(s) - materials science , chemical vapor deposition , lithography , template , polymer , deposition (geology) , polystyrene , nanotechnology , nanolithography , surface energy , silicon , range (aeronautics) , optoelectronics , composite material , fabrication , paleontology , sediment , biology , medicine , alternative medicine , pathology

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