Open AccessEpitaxial BaSnO3 and SrSnO3 perovskite growth on SrTiO3(001) via atomic layer deposition
Author(s) -
Pei-Yu Chen,
Chon Hei Lam,
Bryce I. Edmondson,
Agham Posadas,
Alexander A. Demkov,
John G. Ekerdt
Publication year - 2019
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5111969
Subject(s) - materials science , epitaxy , atomic layer deposition , thin film , analytical chemistry (journal) , perovskite (structure) , band gap , surface roughness , stannate , substrate (aquarium) , electron diffraction , diffraction , crystallography , layer (electronics) , optoelectronics , optics , chemistry , nanotechnology , metallurgy , zinc , composite material , oceanography , physics , chromatography , geology