Open AccessAmorphous sulfide heterostructure precursors prepared by radio frequency sputtering
Author(s) -
Dennice M. Roberts,
John D. Perkins,
A. G. Norman,
Conrad R. Stoldt,
Andriy Zakutayev,
Sage R. Bauers
Publication year - 2019
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5099502
Subject(s) - heterojunction , amorphous solid , materials science , sputtering , sulfide , selenide , thin film , sputter deposition , optoelectronics , nanotechnology , chemistry , crystallography , metallurgy , selenium