Open AccessAmorphous sulfide heterostructure precursors prepared by radio frequency sputtering
Author(s) -
Dennice M. Roberts,
John D. Perkins,
Andrew G. Norman,
Conrad R. Stoldt,
Andriy Zakutayev,
Sage R. Bauers
Publication year - 2019
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5099502
Subject(s) - materials science , heterojunction , amorphous solid , sputtering , sulfide , thin film , sputter deposition , selenide , rutherford backscattering spectrometry , chemical engineering , nanotechnology , optoelectronics , chemistry , metallurgy , crystallography , selenium , engineering
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