Open AccessDual ion beam grown silicon carbide thin films: Variation of refractive index and bandgap with film thickness
Author(s) -
Aakash Mathur,
Dipayan Pal,
Ajaib Singh,
Rohit Singh,
Stefan Zollner,
Sudeshna Chattopadhyay
Publication year - 2019
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5097628
Subject(s) - materials science , thin film , band gap , amorphous solid , refractive index , ellipsometry , raman spectroscopy , scanning electron microscope , amorphous silicon , optoelectronics , silicon , optics , substrate (aquarium) , analytical chemistry (journal) , crystalline silicon , composite material , nanotechnology , crystallography , chemistry , physics , oceanography , chromatography , geology