Open AccessInfluence of nitride buffer layers on superconducting properties of niobium nitride
Author(s) -
John Goldsmith,
Ricky Gibson,
Tim Cooper,
Thaddeus J. Asel,
Shin Mou,
Dave C. Look,
John S. Derov,
Joshua R. Hendrickson
Publication year - 2018
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5044276
Subject(s) - niobium nitride , materials science , sapphire , tin , nitride , buffer (optical fiber) , sputtering , niobium , optoelectronics , layer (electronics) , sputter deposition , superconductivity , chemical vapor deposition , thin film , metallurgy , nanotechnology , optics , condensed matter physics , electrical engineering , laser , physics , engineering