Open AccessReactivity of heterogeneous surfaces: Modeling precursor–surface interaction using absorbing Markov chains
Author(s) -
Angel YanguasGil
Publication year - 2018
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5034178
Subject(s) - sticking probability , nucleation , desorption , diffusion , chemical physics , surface diffusion , particle (ecology) , adsorption , sticking coefficient , markov chain , cluster (spacecraft) , chemistry , work (physics) , statistical physics , materials science , thermodynamics , physics , mathematics , statistics , geology , oceanography , computer science , programming language
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