Open AccessPreventing carbon contamination of Ge (001) during atomic layer deposition with a barium-based Zintl layer
Author(s) -
Song Hu,
John G. Ekerdt
Publication year - 2018
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5029918
Subject(s) - x ray photoelectron spectroscopy , atomic layer deposition , monolayer , barium , layer (electronics) , germanium , materials science , crystallography , deposition (geology) , carbon fibers , analytical chemistry (journal) , chemistry , inorganic chemistry , nanotechnology , silicon , chemical engineering , metallurgy , paleontology , sediment , composite number , engineering , composite material , biology , chromatography