Open AccessHydrogen annealing effects on local structures and oxidation states of atomic layer deposited SnOx
Author(s) -
Shoou-Jinn Chang,
Sriram Vijayan,
Mark Aindow,
Gregory Jursich,
Christos G. Takoudis
Publication year - 2018
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5026696
Subject(s) - annealing (glass) , amorphous solid , tin , materials science , x ray photoelectron spectroscopy , analytical chemistry (journal) , dewetting , crystallography , thin film , chemical engineering , nanotechnology , chemistry , metallurgy , chromatography , engineering