Atomic layer deposition of CeO2 using a heteroleptic cyclopentadienyl-amidinate precursor | Zendy

Maryam Golalikhani | Zendy; Trevor E. James | Zendy; Peter Van Buskirk | Zendy; Wontae Noh | Zendy; JooHo Lee | Zendy; Ziyun Wang | Zendy; Jeffrey F. Roeder | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Atomic layer deposition of CeO2 using a heteroleptic cyclopentadienyl-amidinate precursor

Author(s) -

Maryam Golalikhani,

Trevor E. James,

Peter Van Buskirk,

Wontae Noh,

JooHo Lee,

Ziyun Wang,

Jeffrey F. Roeder

Publication year - 2018

Publication title -

journal of vacuum science and technology. a. vacuum, surfaces, and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.5026405

Subject(s) - atomic layer deposition , cerium , crystallite , stoichiometry , x ray photoelectron spectroscopy , materials science , thermal stability , cyclopentadienyl complex , chemical vapor deposition , layer (electronics) , deposition (geology) , oxygen , cerium oxide , thin film , analytical chemistry (journal) , inorganic chemistry , oxide , chemical engineering , chemistry , nanotechnology , catalysis , metallurgy , organic chemistry , paleontology , sediment , engineering , biology

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research