Open AccessReactive sputter deposition of piezoelectric Sc0.12Al0.88N for contour mode resonators
Author(s) -
Michael David Henry,
Travis Ryan Young,
Erica Ann Douglas,
Benjamin A. Griffin
Publication year - 2018
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5023918
Subject(s) - materials science , sputtering , piezoelectricity , microelectromechanical systems , sputter deposition , composite material , deposition (geology) , stress (linguistics) , silicon , etching (microfabrication) , optoelectronics , tin , thin film , nanotechnology , metallurgy , linguistics , philosophy , layer (electronics) , paleontology , sediment , biology