Open AccessLow-temperature, plasma assisted, cyclic synthesis of MoS2
Author(s) -
Christopher J. Perini,
Michael J. Muller,
B. K. Wagner,
Eric M. Vogel
Publication year - 2018
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5023202
Subject(s) - materials science , x ray photoelectron spectroscopy , raman spectroscopy , stoichiometry , thin film , molybdenum , annealing (glass) , sputtering , photoluminescence , chemical engineering , grain size , electronic structure , analytical chemistry (journal) , nanotechnology , optoelectronics , composite material , chemistry , metallurgy , computational chemistry , optics , organic chemistry , physics , engineering
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