Open AccessLow-temperature, plasma assisted, cyclic synthesis of MoS2
Author(s) -
Christopher J. Perini,
Michael Müller,
B. K. Wagner,
Eric M. Vogel
Publication year - 2018
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5023202
Subject(s) - x ray photoelectron spectroscopy , raman spectroscopy , stoichiometry , materials science , thin film , molybdenum , annealing (glass) , sputtering , photoluminescence , electronic structure , grain size , chemical engineering , analytical chemistry (journal) , nanotechnology , optoelectronics , chemistry , composite material , metallurgy , computational chemistry , optics , organic chemistry , engineering , physics