Open AccessModeling physical vapor deposition of energetic materials
Author(s) -
Koroush Shirvan,
Eric Forrest
Publication year - 2018
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5022805
Subject(s) - materials science , wafer , deposition (geology) , pentaerythritol tetranitrate , physical vapor deposition , etching (microfabrication) , silicon , composite material , analytical chemistry (journal) , thin film , explosive material , nanotechnology , optoelectronics , chemistry , layer (electronics) , organic chemistry , paleontology , sediment , biology