Open AccessQuantification of organic materials by ion implantation
Author(s) -
Chuanzhen Zhou,
F. A. Stevie,
Stephen C. Smith
Publication year - 2018
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5011735
Subject(s) - ion implantation , chemistry , secondary ion mass spectrometry , analytical chemistry (journal) , ion , ion beam , environmental chemistry , organic chemistry