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Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor
Author(s) -
Daniel Higgs,
Jaime W. DuMont,
K.K. Sharma,
Steven M. George
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5004041
Subject(s) - polyamide , materials science , interfacial polymerization , substrate (aquarium) , composite material , polymer , thin film , chemical engineering , analytical chemistry (journal) , chemistry , chromatography , nanotechnology , oceanography , monomer , engineering , geology

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