Open AccessAtomic layer deposition frequency-multiplied Fresnel zone plates for hard x-rays focusing
Author(s) -
N. Moldovan,
Ralu Divan,
Hongjun Zeng,
Leonidas E. Ocola,
Vincent De Andrade,
Michael Wojcik
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5003412
Subject(s) - diamond , materials science , wafer , chemical vapor deposition , resist , lithography , fabrication , etching (microfabrication) , reactive ion etching , atomic layer deposition , optoelectronics , optics , electron beam lithography , layer (electronics) , nanotechnology , composite material , medicine , alternative medicine , physics , pathology