Open AccessUniform sputter deposition of high-quality epitaxial complex oxide thin films
Author(s) -
A. Brewer,
K. H. Cho,
Wittawat Saenrang,
Seung Hyub Baek,
J. Frederick,
C. B. Eom
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4998956
Subject(s) - materials science , thin film , epitaxy , substrate (aquarium) , sputter deposition , sputtering , deposition (geology) , fabrication , optoelectronics , oxide , heterojunction , multiferroics , nanotechnology , ferroelectricity , metallurgy , dielectric , geology , paleontology , layer (electronics) , sediment , medicine , oceanography , alternative medicine , pathology