Open AccessStructural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6
Author(s) -
Jaclyn Coyle,
Christopher A. Apblett,
Michael T. Brumbach,
James Anthony Ohlhausen,
Conrad R. Stoldt
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4998726
Subject(s) - lithium (medication) , silicate , materials science , x ray photoelectron spectroscopy , silicon , analytical chemistry (journal) , thin film , sputter deposition , spectroscopy , chemical engineering , sputtering , chemistry , nanotechnology , optoelectronics , medicine , engineering , endocrinology , physics , chromatography , quantum mechanics