Open AccessToward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
Author(s) -
Christie J. Trimble,
Trevor Van Engelhoven,
Anna Zaniewski,
Manpuneet Benipal,
R. J. Nemanich
Publication year - 2017
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4997421
Subject(s) - graphene , atomic layer deposition , materials science , oxide , plasma , dielectric , graphene oxide paper , nanotechnology , layer (electronics) , deposition (geology) , optoelectronics , graphene nanoribbons , metallurgy , physics , paleontology , quantum mechanics , sediment , biology
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