Open AccessPatterning of electrically tunable light-emitting photonic structures demonstrating bound states in the continuum
Author(s) -
Erika Penzo,
Silvia Romano,
Yu Wang,
Scott Dhuey,
Luca Dal Negro,
Vito Mocella,
Stefano Cabrini
Publication year - 2017
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4994849
Subject(s) - materials science , erbium , surface roughness , optoelectronics , photonic crystal , root mean square , plasma etching , photonics , sputtering , etching (microfabrication) , reactive ion etching , sputter deposition , surface finish , optics , doping , nanotechnology , thin film , composite material , layer (electronics) , physics , electrical engineering , engineering