Open AccessImprovement of silicon waveguide transmission by advanced e-beam lithography data fracturing strategies
Author(s) -
Shane Patrick,
Richard Bojko,
Stefan J. H. Stammberger,
Enxiao Luan,
Lukas Chrostowski
Publication year - 2017
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4991900
Subject(s) - grating , optics , materials science , waveguide , lithography , insertion loss , resist , electron beam lithography , optoelectronics , nanotechnology , physics , layer (electronics)