Open AccessEnergy partitioning and its influence on surface scatter coefficients within fluorinated inductively coupled plasmas
Author(s) -
Angela R. Hanna,
Michael F. Cuddy,
Ellen R. Fisher
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4990682
Subject(s) - excited state , chemistry , plasma , vibrational energy relaxation , radical , vibrational temperature , atomic physics , relaxation (psychology) , molecule , inductively coupled plasma , psychology , social psychology , physics , organic chemistry , quantum mechanics