Open AccessFunctional fatigue of submicrometer NiTi shape memory alloy thin films
Author(s) -
Huilong Hou,
Yin Tang,
Reginald F. Hamilton,
Mark W. Horn
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4983011
Subject(s) - materials science , thin film , shape memory alloy , nickel titanium , temperature cycling , wafer , hysteresis , alloy , phase (matter) , composite material , thermal , metallurgy , optoelectronics , condensed matter physics , nanotechnology , thermodynamics , chemistry , physics , organic chemistry