Variation in the density, optical polarizabilities, and crystallinity of TiO2thin films deposited via atomic layer deposition from 38 to 150 °C using the titanium tetrachloride-water reaction | Zendy

Brandon D. Piercy | Zendy; Collen Z. Leng | Zendy; Mark D. Losego | Zendy

Open Access

Variation in the density, optical polarizabilities, and crystallinity of TiO₂thin films deposited via atomic layer deposition from 38 to 150 °C using the titanium tetrachloride-water reaction

Author(s) -

Brandon D. Piercy,

Collen Z. Leng,

Mark D. Losego

Publication year - 2017

Publication title -

journal of vacuum science and technology. a. vacuum, surfaces, and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.4979047

Subject(s) - atomic layer deposition , x ray reflectivity , amorphous solid , thin film , anatase , materials science , ellipsometry , brookite , crystallinity , analytical chemistry (journal) , raman spectroscopy , rutile , atomic layer epitaxy , titanium , chemistry , nanotechnology , optics , crystallography , photocatalysis , organic chemistry , composite material , metallurgy , physics , catalysis

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