Open AccessVariation in the density, optical polarizabilities, and crystallinity of TiO2thin films deposited via atomic layer deposition from 38 to 150 °C using the titanium tetrachloride-water reaction
Author(s) -
Brandon D. Piercy,
Collen Z. Leng,
Mark D. Losego
Publication year - 2017
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4979047
Subject(s) - atomic layer deposition , x ray reflectivity , amorphous solid , thin film , anatase , materials science , ellipsometry , brookite , crystallinity , analytical chemistry (journal) , raman spectroscopy , rutile , atomic layer epitaxy , titanium , chemistry , nanotechnology , optics , crystallography , photocatalysis , organic chemistry , composite material , metallurgy , physics , catalysis