Open AccessFormation of nickel germanides from Ni layers with thickness below 10 nm
Author(s) -
Lukas Jablonka,
Tomáš Kubart,
Daniel Primetzhofer,
Ahmad Abedin,
PerErik Hellström,
Mikael Östling,
Jean Jordan-Sweet,
C. Lavoie,
Shi-Li Zhang,
Zhen Zhang
Publication year - 2017
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4975152
Subject(s) - annealing (glass) , nucleation , materials science , nickel , thin film , diffraction , analytical chemistry (journal) , metal , atmospheric temperature range , in situ , nickel compounds , phase (matter) , metallurgy , crystallography , nanotechnology , chemistry , optics , thermodynamics , physics , organic chemistry , chromatography