Open AccessAtomic layer deposition of h-BN(0001) on RuO2(110)/Ru(0001)
Author(s) -
Jessica Jones,
Brock Beauclair,
Opeyemi Olanipekun,
Sherard Lightbourne,
Mofei Zhang,
Brittany Pollok,
Aparna Pilli,
Jeffry A. Kelber
Publication year - 2016
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4972784
Subject(s) - x ray photoelectron spectroscopy , epitaxy , low energy electron diffraction , materials science , monolayer , electron diffraction , oxide , analytical chemistry (journal) , annealing (glass) , substrate (aquarium) , photoemission spectroscopy , layer (electronics) , crystallography , nanotechnology , chemistry , diffraction , chemical engineering , metallurgy , optics , geology , physics , oceanography , chromatography , engineering