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Lithography via electrospun fibers with quantitative morphology analysis
Author(s) -
Joshua D. Beisel,
John P. Murphy,
Jessica M. Andriolo,
Emily A. Kooistra-Manning,
Sean Nicolaysen,
Orrin Boese,
Jake Fleming,
Wataru Nakagawa,
Jack L. Skinner
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4964636
Subject(s) - materials science , electrospinning , electrode , lithography , fiber , substrate (aquarium) , nanotechnology , photolithography , voltage , optoelectronics , composite material , polymer , electrical engineering , chemistry , oceanography , engineering , geology

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