Open AccessImpact of parallelism on data volumes for a multibeam mask writer
Author(s) -
Narendra Chaudhary,
Yao Luo,
Serap A. Savari
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4963151
Subject(s) - lossless compression , petabyte , computer science , lithography , throughput , data compression , data transmission , nanolithography , image compression , parallelism (grammar) , computer hardware , parallel computing , optics , telecommunications , image processing , image (mathematics) , artificial intelligence , physics , wireless , medicine , big data , alternative medicine , pathology , fabrication , operating system
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