Open AccessNanoimprint-assisted shear exfoliation plus transfer printing for producing transition metal dichalcogenide heterostructures
Author(s) -
Da Li,
Sungjin Wi,
Mikai Chen,
Byunghoon Ryu,
Xiaogan Liang
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4961384
Subject(s) - heterojunction , materials science , nanolithography , transfer printing , optoelectronics , nanotechnology , nanoimprint lithography , fabrication , exfoliation joint , semiconductor , rectification , transition metal , graphene , chemistry , composite material , electrical engineering , medicine , alternative medicine , engineering , pathology , voltage , biochemistry , catalysis