Open AccessNanoscale Schottky barrier mapping of thermally evaporated and sputter deposited W/Si(001) diodes using ballistic electron emission microscopy
Author(s) -
Westly Nolting,
Chris Durcan,
Avyaya J. Narasimham,
V. P. LaBella
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4958721
Subject(s) - schottky barrier , materials science , sputtering , silicon , sputter deposition , schottky diode , optoelectronics , tungsten , transmission electron microscopy , optics , diode , thin film , nanotechnology , physics , metallurgy