Open AccessIntegration and fabrication of high-performance Sb-based heterostructure backward diodes with submicron-scale airbridges for terahertz detection
Author(s) -
Seikh Mohammad Habibur Rahman,
Zhou Jiang,
Patrick Fay,
Lei Liu
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4953551
Subject(s) - materials science , optoelectronics , fabrication , terahertz radiation , responsivity , detector , parasitic capacitance , capacitance , optics , photodetector , physics , medicine , alternative medicine , electrode , pathology , quantum mechanics