Open AccessAnalysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy
Author(s) -
Fang Liu,
Li Huang,
Lisa M. Porter,
R. F. Davis,
Daniel K. Schreiber
Publication year - 2016
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4953410
Subject(s) - atom probe , superlattice , sapphire , materials science , epitaxy , transmission electron microscopy , heterojunction , diffraction , thin film , analytical chemistry (journal) , scanning transmission electron microscopy , phase (matter) , scanning electron microscope , atom (system on chip) , optoelectronics , crystallography , optics , chemistry , nanotechnology , layer (electronics) , laser , composite material , physics , organic chemistry , chromatography , computer science , embedded system