Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy | Zendy

Fang Liu | Zendy; Li Huang | Zendy; Lisa M. Porter | Zendy; R. F. Davis | Zendy; Daniel K. Schreiber | Zendy

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Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy

Author(s) -

Fang Liu,

Li Huang,

Lisa M. Porter,

R. F. Davis,

Daniel K. Schreiber

Publication year - 2016

Publication title -

journal of vacuum science and technology. a. vacuum, surfaces, and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.4953410

Subject(s) - atom probe , superlattice , sapphire , materials science , epitaxy , transmission electron microscopy , heterojunction , diffraction , thin film , analytical chemistry (journal) , scanning transmission electron microscopy , phase (matter) , scanning electron microscope , atom (system on chip) , optoelectronics , crystallography , optics , chemistry , nanotechnology , layer (electronics) , laser , composite material , physics , organic chemistry , chromatography , computer science , embedded system

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