Open AccessEffect of vacuum thermal annealing to encapsulated graphene field effect transistors
Author(s) -
Κωνσταντίνος Αλεξάνδρου,
Filippos Farmakis,
Alexandros Arapis,
N. Georgoulas,
Yufeng Hao,
James Hone,
Ioannis Kymissis
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4952409
Subject(s) - annealing (glass) , materials science , graphene , passivation , transistor , optoelectronics , thermal stability , doping , nanotechnology , field effect transistor , chemical engineering , composite material , electrical engineering , layer (electronics) , voltage , engineering