Open AccessIn situ monitoring of hydrogen desorption from silicon nanoparticles dispersed in a nonthermal plasma
Author(s) -
Thomas Lopez,
Lorenzo Mangolini
Publication year - 2016
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4946839
Subject(s) - materials science , silicon , hydrogen , silane , nanoparticle , analytical chemistry (journal) , plasma , argon , fourier transform infrared spectroscopy , plasma cleaning , absorption (acoustics) , infrared spectroscopy , chemical engineering , nanotechnology , atomic physics , optoelectronics , chemistry , composite material , organic chemistry , chromatography , quantum mechanics , physics , engineering
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