Open AccessIn situ monitoring of hydrogen desorption from silicon nanoparticles dispersed in a nonthermal plasma
Author(s) -
Thomas Lopez,
Lorenzo Mangolini
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4946839
Subject(s) - silicon , hydrogen , silane , materials science , analytical chemistry (journal) , nanoparticle , plasma , fourier transform infrared spectroscopy , argon , infrared spectroscopy , plasma cleaning , absorption (acoustics) , chemistry , chemical engineering , nanotechnology , optoelectronics , composite material , physics , organic chemistry , chromatography , quantum mechanics , engineering