Open AccessCharacterization of individual free-standing nano-objects by cluster SIMS in transmission
Author(s) -
Sheng Geng,
Stanislav V. Verkhoturov,
Michael J. Eller,
Aaron B. Clubb,
E. A. Schweikert
Publication year - 2016
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4943027
Subject(s) - secondary ion mass spectrometry , graphene , ion , nanoparticle , mass spectrometry , yield (engineering) , materials science , analytical chemistry (journal) , static secondary ion mass spectrometry , cluster (spacecraft) , chemistry , nanotechnology , organic chemistry , chromatography , computer science , metallurgy , programming language