Open AccessZero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr
Author(s) -
Timothy J. Peshek,
James M. Burst,
Timothy J. Coutts,
Timothy A. Gessert
Publication year - 2016
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4939830
Subject(s) - sputtering , partial pressure , oxygen , analytical chemistry (journal) , materials science , indium tin oxide , stoichiometry , sputter deposition , electrical resistivity and conductivity , doping , oxide , thin film , chemistry , metallurgy , nanotechnology , optoelectronics , electrical engineering , environmental chemistry , organic chemistry , engineering
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