Open AccessStanding and sitting adlayers in atomic layer deposition of ZnO
Author(s) -
Zhengning Gao,
Fei Wu,
Yoon Myung,
Ruixiang Fei,
Ravindra K. Kanjolia,
Li Yang,
Parag Banerjee
Publication year - 2015
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4938080
Subject(s) - chemistry , molecule , atomic layer deposition , adsorption , reactivity (psychology) , density functional theory , computational chemistry , photochemistry , layer (electronics) , organic chemistry , medicine , alternative medicine , pathology