Open Access1.5 nm fabrication of test patterns for characterization of metrological systems
Author(s) -
Sergey Babin,
Giuseppe C. Calafiore,
Christophe Péroz,
R. Conley,
Nathalie Bouet,
Stefano Cabrini,
Elaine R. Chan,
Ian Lacey,
Wayne R. McKinney,
Valeriy V. Yashchuk,
András Vladár
Publication year - 2015
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4935253
Subject(s) - metrology , fabrication , characterization (materials science) , materials science , optics , tungsten , microscope , dimensional metrology , scanning electron microscope , nanotechnology , physics , medicine , alternative medicine , pathology , metallurgy
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