Open AccessTemporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas
Author(s) -
Kōichi Tanaka,
André Anders
Publication year - 2015
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4926750
Subject(s) - atomic physics , ion , plasma , ionization , chemistry , materials science , physics , nuclear physics , organic chemistry
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