Open AccessPossible applications of scanning frequency comb microscopy for carrier profiling in semiconductors
Author(s) -
Mark J. Hagmann,
Petru Andrei,
Shashank Pandey,
Ajay Nahata
Publication year - 2014
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4905095
Subject(s) - scanning tunneling microscope , semiconductor , materials science , electrochemical scanning tunneling microscope , microwave , laser , optoelectronics , ultrashort pulse , scanning probe microscopy , microscopy , optics , scanning tunneling spectroscopy , nanotechnology , physics , quantum mechanics