Open AccessCross-sectional atomic force microscope in scanning electron microscope
Author(s) -
Byong Chon Park,
Woon Song,
Dal Hyun Kim,
Ju-Yeop Lee,
Jaewan Hong,
Jin Seung Kim
Publication year - 2014
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4901565
Subject(s) - scanning electron microscope , microscope , grating , optics , materials science , cross section (physics) , scanner , signal (programming language) , electron microscope , physics , quantum mechanics , computer science , programming language
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