Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering | Zendy

Bojanna P. Shantheyanda | Zendy; Vinit Todi | Zendy; Kalpathy B. Sundaram | Zendy; A. G. Vijaya Kumar | Zendy; Isaiah O. Oladeji | Zendy

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Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

Author(s) -

Bojanna P. Shantheyanda,

Vinit Todi,

Kalpathy B. Sundaram,

A. G. Vijaya Kumar,

Isaiah O. Oladeji

Publication year - 2011

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.3624787

Subject(s) - materials science , x ray photoelectron spectroscopy , thin film , sputter deposition , microstructure , cavity magnetron , crystallite , sputtering , doping , analytical chemistry (journal) , substrate (aquarium) , surface roughness , electrical resistivity and conductivity , grain size , metallurgy , optoelectronics , composite material , chemical engineering , nanotechnology , chemistry , oceanography , electrical engineering , chromatography , geology , engineering

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