Open AccessRapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation
Author(s) -
Jonilyn G. Longenecker,
Eric W. Moore,
John A. Marohn
Publication year - 2011
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.3581102
Subject(s) - cantilever , materials science , nanorod , electron beam lithography , nanotechnology , magnetic force microscope , magnet , optoelectronics , focused ion beam , magnetometer , nanomagnet , resist , ion , magnetization , magnetic field , layer (electronics) , chemistry , composite material , physics , organic chemistry , quantum mechanics
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